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Standard
Deformable Mirrors

Deformable Mirrors are advanced wavefront control devices with outstanding optical quality. Our mirrors consist of a mirror membrane supported by an underlying actuator array. Each actuator can be individually deflected by electrostatic actuation to achieve the desired pattern of deformation.

MEMS Deformable Mirrors:
Architecture Description

The Boston Micromachines MEMS deformable mirror design is simple in concept but powerful in its capabilities.

An actuator array is built upon a cartesian layout of electrodes. The supported mirror facesheet moves without strong inter-actuator coupling. In addition, the MEMS architecture enables the fastest response time of any deformable mirror and the precision is only limited by the electronics. Our standard drivers enable 14 bit precision and increased resolution is available.

Finally, the scalable fabrication process allows us to create multiple configurations in large quantities, enabling lower cost at high volumes.

The Multi-DM Family

A versatile deformable mirror system for advanced wavefront control.
The popular Multi-DM family offers sophisticated aberration compensation in an easy-to-use package. With 137 or 140 precisely controlled elements and low inter-actuator coupling, this type of system is ideal for a broad range of applications including microscopy, astronomy, retinal imaging, and laser beam shaping. Scroll down for more information on options.

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The Kilo-DM Family

The Kilo-DM Family offers enabling components for precise, high resolution wavefront control with low response time.
With up to 952 actuators controlled to under 1nm of precision with no hysteresis, this system type is ideal for demanding applications. For added speed, low-latency drive electronics are capable of 60 kHz frame rate with 14 bit step resolution.

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The +K DM Family

The +K-DM Family: High spatial-resolution wavefront correctors for next generation applications in astronomy and laser communication.
The large array of underlying actuators enables extreme wavefront manipulation for specialized applications. Our +K-DM systems are found at astronomical installations around the world and enable discovery at such on-sky instruments as the Subaru Coronagraph Extreme Adpative Optics (SCExAO) instrument, the Gemini Planet Imager (GPI) and the Magellan Extreme Adaptive Optics (MagAO-X) instrument.

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Continuous Deformable Mirror Standard Models

DM Models
Layout
Total Actuator Count *
Actuator Count Across Aperture
Physical Stroke (μm)
Wavefront Stroke (µm)
Aperture (mm)
Pitch (μm)
Mechanical Response
(small step, 10% – 90%) (μs)
Digital Update Rate:
Standard (kHz)
Digital Update Rate:
High Speed (kHz)
Approximate Interactuator
Coupling
Multi-C-1.5L-DM 137 13 1.5 3.0 4.80 400 <75 2 100 15%
Multi-3.5-DM 140 12 3.5 7.0 4.40 400 <75 2 100 13%
Multi-3.5L-DM 140 12 3.5 7.0 4.95 450 <75 2 100 13%
Multi-5.5-DM 140 12 5.5 11.0 4.95 450 <100 2 100 22%
276-1.5-DM 276 18 1.5 3.0 6.30 300 <20 45 60 15%
276-3.5-DM 276 18 3.5 7.0 8.40 400 <75 45 60 13%
276-5.5-DM 276 18 5.5 11.0 9.45 450 <100 45 60 22%
492-S-0.6-DM 492 24 0.6 1.2 6.90 300 <20 60 n/a 15%
492-S-1.0-DM 492 24 1.0 2.0 9.20 400 <75 60 n/a 13%
492-1.5-DM 492 24 1.5 3.0 6.90 300 <20 45 60 15%
492-3.5-DM 492 24 3.5 7.0 9.20 400 <75 45 60 13%
492-5.5-DM 492 24 5.5 11.0 10.35 450 <100 45 60 22%
648-5.5-DM 648 28 5.5 11.0 12.15 450 <100 45 60 22%
Kilo-CS-0.6-DM 952 34 0.6 1.2 9.90 300 <20 60 n/a 15%
Kilo-CS-1.0-DM 952 34 1.0 2.0 13.20 400 <75 60 n/a 13%
Kilo-C-1.5-DM 952 34 1.5 3.0 9.90 300 <20 45 60 15%
Kilo-C-3.5-DM 952 34 3.5 7.0 13.20 400 <75 45 60 13%
2K-1.5L-DM 2040 50 1.5 3.0 19.60 400 <40 30 n/a 15%
2K-3.5-DM 2040 50 3.5 7.0 19.60 400 <75 30 n/a 13%
3K-1.5-DM 3063 62 1.5 3.0 18.30 300 <20 16 n/a 15%
4K-3.5-DM 4092 64 3.5 7.0 25.20 400 <75 16 n/a 13%
Please Note: Fill factor >99% (DM)
Please Note: Surface figure: <30nm
* Custom actuator counts available upon request
 

Segmented Deformable Mirror Standard Models

DM Models
Layout
Total Actuator Count *
Actuator Count Across Aperture
Physical Stroke (μm)
Wavefront Stroke (µm)
Aperture (mm)
Pitch (μm)
Mechanical Response
(small step, 10% – 90%) (μs)
Digital Update Rate:
Standard (kHz)
Digital Update Rate:
High Speed (kHz)
Approximate Interactuator
Coupling
492-S-1.0-SLM 492 24 1.0 2.0 9.60 400 <80 60 n/a 0%
492-3.5-SLM 492 24 3.5 7.0 9.60 400 <80 45 60 0%
Kilo-CS-1.0-SLM 952 34 1.0 2.0 13.60 400 <80 60 n/a 0%
Kilo-C-3.5-SLM 952 34 3.5 7.0 13.60 400 <80 45 60 0%
2K-1.5-SLM 2040 50 1.5 3.0 20.00 400 <20 30 n/a 0%
2K-3.5-SLM 2040 50 3.5 7.0 20.00 400 <80 30 n/a 0%
Please Note: Fill factor >99% (DM)
Please Note: Surface figure: <30nm
* Custom actuator counts available upon request

Multi-Driver

USB 2.0 interface
120-240 VAC input
14 bit step resolution
Maximum Frame Rate: 8 kHz
Dimensions (W × D × H): 9" x 7" x 2.5"

S-Driver

DIO interface: SFP fiber link (2.5 Gbps)
Latency†: 22.7 µsec
Maximum Frame Rate: 60 kHz
Resolution: 12 Bit
Average Voltage Step Size: 14 mV
Dimensions: 3.5" x 19" x 14" x2
(2 separate 2U Chassis for 19" Rack: Driver and Power Supply)
Connector Dimensions (W x D x H): 3.5" x 12" x 19"
Power Requirements: 120V 3A / 240 V, AC available

Kilo-Driver

DIO Interface: SFP fiber link connection via PCIe Interface Card
Form Factor: 3U Chassis (5.25" x 19" x 14")
14 bit step resolution
Maximum Frame Rate: 34 kHz
Latency†: 30µsec
Dimensions: 5.25" x 19" 14"

X-Driver

DIO Interface: Camera Link via PCIe Interface Card
#Parallel HV Output Channels: 32 or 140
Maximum Output Voltage: 300 V
HV Interface: 37-Pin D-Sub Connector (4x)
Resolution: 14-bit
Voltage Step Size: 18mV
Latency: <2µsec
Single Channel Update Rate: 400 kHz
Maximum Frame Rate (140 Channels): 100 kHz
External Power Supply: 24 V DC, 2A Max
Dimensions(W × D × H): 9" x 7" x 2.5"

Kilo-Low-Latency-Driver

DIO Interface: SFP fiber link connection via PCIe Interface Card
Form Factor: 3U Chassis (5.25" x 19" x 14")
14 bit step resolution
Maximum Frame Rate: 34 kHz
Latency†: 17µsec
Dimensions: 5.25" x 19" 14"

+K Driver

DIO interface: SFP fiber link (2.5 Gbps)
120-240 VAC input
14 bit step resolution
Frame Rate: 20 kHz
Dimensions: 5.25" x 19" x 14" (3U Chassis)

Where Are Deformable Mirrors Used?

  • Astronomy

    Our deformable mirror models are fielded at prominent astronomical facilities around the world to help researchers improve wavefront correction capabilities, enabling cutting edge space telescope concepts.

  • Microscopy

    Our robust deformable mirror systems allow users precise wavefront control in a user-friendly design, making our deformable mirror the ideal wavefront corrector for many microscopy modalities.

  • Laser Communication

    Boston Micromachines Corporation has experience providing deformable mirror hardware for free-space laser communication applications to a host of companies and government organizations.

  • Laser Research

    In contrast to liquid crystal spatial light modulators (SLMs), MEMS deformable mirrors have recently emerged as a high-speed alternative with significant advantages. In addition, MEMS DMs are also more cost-effective, more optically efficient, and can perform simultaneously at multiple wavelengths.

  • Retinal Imaging

    Our systems enable unmatched in vivo imaging capabilities at the cellular level for earlier detection and accurate diagnoses of eye diseases. A clear view of the retina in vivo with high-resolution detail of photoreceptors and vascular flow gives vital details that are needed.

We can help find the right device for you.

Boston Micromachines Corporation has the best components available to help you make your research project a reality. Unsure which deformable mirror will best suit your needs? We can help you make the optimal choice so that you can focus on moving your research forward.