Technology Development

The Segmented Deformable Mirror (DM) has a segmented reflective mirror surface with no coupling between the mirror surfaces of adjacent segments. The number of mirror segments is equal to or less than the number of actuators in the entire actuator array. In Segmented DMs, actuator arrays can be linear, square grid, or other type of pattern.  Mirror segments in Segmented DMs can be controlled by one or more actuators.

• With one actuator per mirror segment, the segment can move in a single direction.
• With two actuators per mirror segment, the segment can move in a single direction and tilt in one plane.
• With three actuators per mirror segment, the segment can move in a single direction and tilt in any plane.*

Segmented Deformable Mirror Surface

 

More information about standard models can be found on the Standard Deformable Mirrors page.

*Certain type of segmented mirror that many have found useful across an array of applications: The Hex-TTP deformable mirror.

DM Models	Layout	Total Actuator Count **	Actuator Count Across Aperture	Physical Stroke (μm)	Wavefront Stroke (µm)	Aperture (mm)	Pitch (μm)
492-1.5		492	24	1.5	3.0	6.90	300
492-3.5		492	24	3.5	7.0	9.60	400
Kilo-C-1.5		952	34	1.5	3.0	9.90	300
Kilo-C-3.5		952	34	3.5	7.0	13.60	400
2K-1.5		2040	50	1.5	3.0	20.00	400
2K-3.5		2040	50	3.5	7.0	20.00	400

At Boston Micromachines, we recognize that for many advanced optical systems, coating performance can be just as critical as device architecture. Whether you are working in the visible, near-infrared, or extended infrared spectrum, having the right reflective coating is essential to maximize efficiency and accuracy in your setup.

Custom Coatings for Precision Optical Performance

Our MEMS-based devices come standard with high-performance coatings such as protected silver, enhanced aluminum, and gold. These coatings cover a broad range of typical optical needs, but we know many research and industrial applications push beyond the norm. That is why we also offer custom coating solutions for our deformable mirrors operating in extended or specialized wavelength ranges.

Below is a figure showing the reflectivity curves of our standard protected silver, enhanced aluminum and gold coatings. We have developed other variations for specific applications in the infrared wavelength band. Please contact us if you have specific needs to see what is possible.

Deformable Mirrors for Extreme Environments

Not all applications happen in ideal lab conditions and at Boston Micromachines, we are developing solutions for those that do not. From space-based optics to cryogenic systems, our deformable mirrors have been tested and deployed in some of the most demanding environments.

We offer robust customization options to ensure performance and survivability under a range of extreme conditions such as high-vacuum, low-temperature, or radiation exposure.

Our deformable mirrors have been successfully used in cryo-chambers and in space — check out our FAQ for more information.

In Development: Hermetically Sealed DMs

We are currently developing a hermetically sealed variant of our deformable mirrors, which is designed to:

• Eliminate the need for external vacuum-purge chambers.
• Offer significantly higher resistance to moisture, dust, and atmospheric pressure changes.
• Enhance long-term reliability in space, field, and industrial environments.

While not yet part of our standard product line, this option has been successfully prototyped and will be brought to market quickly to meet customer demand. If your system requires the tightest environmental control with minimal maintenance, this sealing approach may be ideal.

Customer-Led Innovation: Custom Mechanical Designs for Your Optical System

At Boston Micromachines, many of our most impactful component designs have come directly from the needs and ingenuity of our customers. From space telescopes to biomedical instruments, we have worked alongside system integrators, researchers, and OEM partners to deliver tailored mechanical solutions that go far beyond our off-the-shelf offerings.

Tailored to Fit, Built to Perform

We understand that every optical system is unique, and we are equipped to help bridge the gap between your requirements and our core MEMS technology. Over the years, we have designed and delivered:

• Custom housings for tight enclosures, high-angle incidence setups, or beam steering configurations.
• Vacuum- and purge-compatible assemblies.
• Customized windows with specific materials, coatings, or bonding methods to support challenging environments.
• Alternate cable routing and connector solutions to integrate cleanly with custom hardware layout or interface specifications.

We believe that flexibility is critical in early-stage system design, and we pride ourselves on being a responsive partner throughout that process. Our goal is to bridge any needs between our standard product and your design.

Custom Modulators Tailored to Your Application

At Boston Micromachines, we know that cutting-edge optical applications often require more than off-the-shelf solutions. Whether you’re operating in non-standard wavelength ranges or pushing the limits of modulation speed, we offer customizable MEMS Grating Modulators designed to meet your specific performance needs.

High-Speed Modulation

Our MEMS Grating Modulators support high-speed operation with modulation frequencies up to 200 kHz. These devices maintain consistent performance across the full range and do not rely on resonance, offering flexibility across a variety of time-critical applications. If your requirements stretch beyond standard limits, we can explore custom configurations with higher operational rates.

Extended Wavelength Compatibility

While our standard devices are optimized for 600-1100 nm wavelength range, we have successfully extended performance into the 1300-1800 nm range and have demonstrated capability up to 2200 nm in proof-of-concept devices. These extended-range modulators require modifications such as higher drive voltages and are subject to additional testing and qualification.

Contact us to explore how our modulator technology can be tailored to your application. Our team is ready to provide technical guidance, quote custom builds, and help you integrate the right solution into your system.