MEMS Deformable Mirrors
MEMS deformable mirrors are the most commonly used architecture in many AO applications given
their versatility, the maturity of technology, and high-resolution wavefront correction capabilities.
Using advanced, inexpensive manufacturing technology, MEMS DMs' performance strengths are
inherent to micromachining:
1. Large arrays create high resolution wavefront correction.
2. Advanced microstructures allow minimal influence between adjacent actuators for high spatial frequency surfaces.
3. Optimized design enables rapid wavefront shaping for high speed applications.